Nanomanufacturing

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• Multiphysics of Microfluidics [ Acoustofluidics | Optofluidics ]
• Multiphysics of Active Nanostructures [ Nanomanufacturing | Nanophotonics ]

Due to their unique electronic, magnetic, and optical properties compared with bulk materials, nanomaterials and nanostructures have tremendous potential in many applications. We are devoted to the development of novel nanostructures, which offer interesting photonic properties and could be readily applied to medical diagnostics and therapeutics. These nanostructures will bridge the interface between modern molecular biology and nanotechnology.

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Go to Top | References

YB Zheng et al., Journal of Applied Physics, Vol. 103, pp. 014308, 2008.

We have developed a novel self-assembly-based tunable mask apparatus that can produce nanostructure arrays with highly controllable shapes and sizes (Fig. left) This parallel nanofabrication method is fast, precise, versatile, cost-effective, and substrate general; in many aspects, it compares favorably with the traditional nanofabrication techniques such as e-beam lithography and nanoimprinting lithography.

Figure: Representative nanostructures produced using self-assembly-based tunable mask apparatus: (a) gold nanoprisms; (b) gold nanodisks; © triangular nanoholes; (d) circular nanoholes in gold thin film.

Vincent K. S. Hsiao et. al, Journal of Materials Chemistry, Vol. 17, pp. 4896-4901, 2007.

We have also developed a hololithography system (Fig. right) that enables rapid fabrication of periodic nanostructure, and the nano-grating structure fabricated by this technique were successfully employed in a variety of chemical/bio sensing.

Figure : (a). Schematic of the optical setup for fabricating onedimensional, nanoporous polymer. (b) A typical SEM image of nanostructure fabricated in this way.

Q Hao et al., Applied Physics Letters, Vol. 97, pp. 193101-193103, 2010.

An efficient technique is developed based on electron-beam lithography (EBL) to fabricate optically thin metallic films with subwavelength patterns and their complements simultaneously. By comparing the spectra of the complementary films, we show that Babinet’s principle nearly holds for these structures in the optical domain. Rigorous full-wave simulations are employed to verify the experimental observations. It is further demonstrated that a discrete-dipole approximation can qualitatively describe the spectral dependence of the metallic membranes on the geometry of the constituent particles as well as the illuminating polarization.

Figure: Schematic for the fabrication of the nanoparticle and complementary hole structures, with SEM images of particle and hole arrays. This process is capable of fabricating nanoscale complementary structure simultaneously.

Electron beam lithography (EBL) is a versatile tools, capable of making periodical nanostructures with almost any shapes without using any mask. Sub-100 nm nanostructures are routinely fabricated for our research. Focus ion beam milling can also generate highly ordered nanostructures by etching into the metal film.
Figure : (a). A typical EBL sample: Split-ring Resonator. (b). Metallic grating fabricated by FIB.

Go to Top | Research Highlights

1. Yan Jun Liu, Jinjie Shi, Fan Zhang, Huinan Liang, Jian Xu, Akhlesh Lakhtakia, Stephen J. Fonash, and Tony Jun Huang, High-Speed Optical Humidity Sensors Based on Chiral Sculptured Thin Films, Sensors and Actuators B Chemicals, 2011, DOI:10.1016/j.snb.2011.02.003.
2. Qingzhen Hao, Yong Zeng, Xiande Wang, Yanhui Zhao, Bei Wang, I-Kao Chiang, Douglas H. Werner, Vincent Crespi, and Tony Jun Huang, Characterization of Complementary Patterned Metallic Membranes Produced Simultaneously by a Dual Fabrication Process, Applied Physics Letters, Vol. 97, pp. 193101, 2010. (featured as front cover image) [PDF]
3. Vincent K.S. Hsiao, Yue Bing Zheng, Heike Betz, Brian Kiraly, Wei Yan, Pamela F. Lloyd, Timothy J. Bunning, Alexander N. Cartwright, and Tony Jun Huang, Holographically Fabricated Dye-Doped Nanoporous Polymers as Matrix for Laser Desorption/Ionization Mass Spectrometry, ASME Journal of Nanotechnology in Engineering and Medicine, Vol. 1, PP. 041011, 2010. [PDF]
4. Yue Bing Zheng, Bala Krishna Juluri, Brian Kiraly, and Tony Jun Huang, Ordered Au Nanodisk and Nanohole Arrays: Fabrication and Applications, ASME Journal of Nanotechnology in Engineering and Medicine, Vol. 1, pp. 031011, 2010. [PDF]
5. Wei Yan, Vincent K.S. Hsiao, Yue Bing Zheng, Yasir M. Shariff, Tieyu Gao, Tony Jun Huang, Towards Nanoporous Polymer Thin Film-Based Drug Delivery Systems, Thin Solid Films, Vol. 517, pp. 1794-1798, 2009. [PDF]
6. Jinjie Shi, Vincent K. S. Hsiao, Thomas R. Walker, Tony Jun Huang, Humidity Sensing Based on Nanoporous Polymeric Photonic Crystals, Sensors and Actuators B: Chemical, Vol. 129, pp. 391-396, 2008. [PDF]
7. Vincent K. S. Hsiao, John R. Waldeisen, Yuebing Zheng, Pamela F. Lloyd, Timothy J. Bunning, Tony Jun Huang, Aminopropyltriethoxysilane (APTES)-Functionalized Nanoporous Polymeric Gratings: Fabrication and Application in Biosensing, Journal of Materials Chemistry, Vol. 17, pp. 4896-4901, 2007. [PDF]
8. Jinjie Shi, Vincent K. S. Hsiao, Tony Jun Huang, Nanoporous Polymeric Transmission Gratings for High-Speed Humidity Sensing, Nanotechnology, Vol. 18, pp. 465501, 2007. [PDF]
9. Yuebing Zheng, Bala Krishna Juluri, Tony Jun Huang, Self-Assembly of Monodisperse Nanospheres within Microtubes, Nanotechnology, Vol. 18, pp. 275706, 2007. [PDF]
10. Tony Jun Huang, Minghsun Liu, Linda D. Knight, Wayne W. Grody, Jeff F. Miller, Chih-Ming Ho, An Electrochemical Detection Scheme for Identification of Single-Nucleotide Polymorphisms Using Hairpin-Forming Probes, Nucleic Acids Research, Vol. 30, pp. e55, 2002. [PDF]