MATSE 565
Processing and Performance
of Metals for Electronics
Course Content
Electronic Properties of Materials
Deposition of Metal and Alloy Films
Deposition Methods
Physical vapor deposition
Chemical vapor deposition
Electrochemical deposition
Stress in deposited films
Interdiffusion and Interfacial Reactions in Thin Metal Films
Thermodynamic considerations
Kinetics
Diffusion barriers
Electronic Theory and Processing of Metal/Semiconductor Contacts
Schottky barriers
Ohmic contacts
Epitaxial metal/semiconductor structures
Interconnects and Connectors
Interconnects in microelectronics
Connectors between components
Theory of metal/metal contacts
Reliability issues
Manufacturing concerns
[S. E. Mohney]
[Materials Science & Engineering]
© Copyright 1998 by Suzanne Mohney and Gary L. Gray. All rights reserved.